Thermo Fisher Scientific has unveiled the Thermo Scientific™ Metrios™ 6 Scanning Transmission Electron Microscope ((S)TEM), a new-generation, fully automated (S)TEM metrology solution that aims to enhance productivity and ensure data quality assurance in high-volume semiconductor manufacturing. The Metrios 6 (S)TEM offers up to 20% average productivity improvement compared to its predecessor, enabling fully automated TEM metrology and characterization workflows. With increasingly complex semiconductor device architectures, accurate and detailed metrology processes are crucial. Thermo Fisher recognizes the need for a highly automated (S)TEM platform that can provide faster access to large-volume, high-quality data to accelerate learning cycles.
The Metrios 6 (S)TEM is designed to increase productivity and speed up data acquisition for improved yield and reduced time-to-market. It incorporates industry-leading hardware and machine-learning algorithms to rapidly obtain large-volume high-quality data from complex devices and novel materials. The Smart Stage feature eliminates manual operation and potential human errors, allowing for faster high-resolution imaging. The new Thermo Scientific Ultra-X EDS detection system enables fast compositional characterization and elemental mapping on beam-sensitive materials with at least two times